ZYGO ZMI-2002 | Laser Interferometer Measurement Board, In Stock

Description

Note: Many products are not yet listed. Please contact us for more product information. Our supply channels are constantly expanding, and we currently have 20 stable shared supply channels. Please confirm the model, product, price, and all other necessary information with customer service before placing an order. We offer new, refurbished, and used products, and prices are adjusted according to the year of the item you require.

3. Key Technical Specifications

Do not order against this table alone. I cannot confirm the channel count, the board interface, and the measurement resolution from the model number. Match every line against the OEM datasheet and the label on your existing board.

4. Product Introduction

The ZYGO ZMI-2002 is a measurement board for the Zygo ZMI (Zygo Measurement Interferometer) system. It processes the signals from a laser interferometer and converts them into high-resolution displacement and position data for the host system. It is the electronics that turn the optical interference pattern into a number the machine or the metrology system can use.

The engineering value is the resolution and the stability. ZMI systems are used where displacement must be measured to the nanometer or sub-nanometer level — semiconductor lithography stages, precision machine tools, and calibration labs. The ZMI-2002 board handles the signal conditioning, the fringe counting, and the interpolation that produce that resolution. In my experience, the most common cause of a measurement failure on a ZMI system is not the board — it is the laser head, the interferometer optics, or a contaminated optical surface. The board reports the signal loss, but it cannot fix a misaligned optic or a dirty window.

Two things decide whether a swap works. First, the board revision and firmware. The ZMI system firmware and the host software expect a specific board revision, and a mismatched board may not initialize or may report incorrect scaling. Second, the channel and optics configuration. The board’s channel count and the interferometer configuration must match the measurement setup.

ZMI-2002

ZMI-2002

ZMI-2002

ZMI-2002

ZMI-2002

5. Application Scenarios & Field Experience

Part 1 – Narrative Paragraph

The failure that hurts most on a precision measurement system is not a dead board — it is a board that reads within tolerance on a bench check and drifts in the application. The system reports a position, the stage moves, and the measurement is off by a few nanometers. I have seen that on a lithography stage where the ZMI board had a thermal drift in the interpolation circuit. The board passed a power-on self-test. The measurement was wrong. When you replace a ZMI-2002, verify the board against a known reference — a calibration standard or a stable interferometer setup — before you trust it in a production measurement.

Part 2 – Numbered List (Application Scenarios)

1. Semiconductor – Wafer Stage Position Measurement – The board processes the interferometer signals from the wafer stage and provides the position feedback for the lithography exposure. The resolution and the update rate determine the overlay accuracy.
2. Precision Machine Tools – Linear Axis Calibration – Used to calibrate the linear axes of a precision machine tool. The board measures the axis displacement against the laser wavelength, and the calibration software compares the result to the machine’s encoder.
3. Metrology – Coordinate Measuring Machine (CMM) Verification – The board provides the reference displacement for verifying a CMM’s accuracy. The ZMI measurement is the traceable standard that the CMM is compared against.
4. Aerospace – Structural Test Displacement Measurement – Used in a structural test rig to measure the displacement of a test article under load. The high resolution detects small deflections that a conventional transducer would miss.

Part 3 – Short Field Story

A semiconductor fab had a lithography stage that was producing overlay errors at the edge of the wafer. The maintenance team had recalibrated the stage and replaced the encoders, and the errors persisted. We asked them to check the ZMI interferometer signal and the measurement board. The ZMI-2002 board was reporting a position that drifted by 2 nm over a temperature cycle. The board’s interpolation circuit had aged. We supplied a replacement board and the fab re-ran the overlay test. The edge errors dropped back into specification. The original board had been working — it was just out of tolerance.

6. Standard Operating Procedure (SOP) for Quality Control

• Visual & Origin Inspection – We verify the Zygo marking, the ZMI-2002 model string, and the date code. We inspect the board connector and the front-panel connectors for bent pins or damage. A board with a cracked connector or evidence of moisture ingress is rejected.
• Revision and Firmware Documentation – We read and photograph the full model string, the firmware revision, and the board revision code. That record ships with the board so you can compare it against the unit you are replacing.
• Host Fit Verification – Each board is seated in a compatible ZMI chassis or host card to confirm the connector engages fully and the retention mechanism holds. A board that fits loosely will cause intermittent measurement faults.
• Power-Up Self-Test – The board is powered in a live ZMI test setup and we verify it completes its boot sequence and that the host recognizes the board type without a fault.
• Signal Input Verification – We connect a calibrated interferometer signal source and verify the board’s measurement output against the reference. We test at multiple displacement points to catch interpolation errors.
• Resolution and Stability Test – We verify the board’s resolution and short-term stability against the OEM specification. A board that passes the static test but drifts under temperature is flagged.
• Channel Verification – We exercise each measurement channel and verify the board reports the correct data for each channel.
• ESD-Safe Packaging – The board is wrapped in anti-static film, seated in a conductive foam insert with the connectors protected by rigid shrouds, and packed in a double-wall carton with static warning labels.

7. Frequently Asked Questions (FAQ)

Q1: What is the difference between the and other ZMI boards?

A: The ZMI series includes several measurement boards with different channel counts, interfaces, and firmware revisions. The 2002 designation identifies a specific board in that family, but I cannot confirm the exact channel count and interface from the model number alone. Read the label on your existing board and compare it to the replacement before you order. If you send us a photo of the board label, we will confirm the match.

Q2: Will this board work with my existing ZMI laser head and optics?

A: Only if the board’s firmware and configuration match the laser wavelength and the interferometer configuration. The ZMI system is a matched set — the laser head, the optics, the receiver, and the measurement board must all be compatible. Verify the board revision against the OEM documentation for your laser head and optics before you order.

Q3: What is the warranty on this board?

A: We offer a 12-month warranty from the ship date. It covers component failure, measurement channel failure, and connector failure under normal operating conditions. It does not cover damage from incorrect power supply voltage, ESD damage from handling without a wrist strap, or physical damage to the connectors. We test every board against a calibrated signal source before it ships.

Q4: Do you have this exact board in stock?

A: Zygo ZMI inventory is legacy and varies by revision. Confirm availability before you plan an outage. If we are out of the revision you need, we will tell you what we actually have rather than quote a date we cannot hold.

Q5: Any installation pitfalls I should watch for?

A: Four. First, power down the ZMI chassis before inserting or removing the board — these boards are not hot-swap capable. Second, record the firmware revision and the board revision code from the old board before you remove it. Third, verify the laser head and the interferometer optics are clean and aligned before you power up the replacement; a dirty optic will look like a board failure. Fourth, after the swap, verify the measurement against a known reference before you return the system to service. A board that powers up is not necessarily measuring correctly.